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Piezo-electrical Thin Film: Deposition, Etching and Characterization for both Sensing and Actuation

Bulk piezo-electric sensing and actuation are well established phenomenons. However, their use in microsystems have been rather limited mainly because of relatively new field of piezo-electric thin films especially for micro-actuation and sensing applications.

Infact, majority of piezo-electric based micro-systems have been employing bulk piezo-electric material. The challenge with piezo-electric thin films lays on deposition, etching and film piezo-electric quality.

This project aims at new micro-fabrication approaches for deposition, and etching (patterning) piezo-electric thin films with improved performace piezo-electric coefficients.

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